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SEMI C24-0813 (technical revision)
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11
Capacity tests are done by adding ppm levels of a given gaseous impurity to a pure zero gas and monitoring the effluent of the test purifier for active impurity species
SEMI D68 — Test Method for Optical Properties of Electronic Paper Displays
This Specification only describes information that is static in nature (i
F05900 - SEMI F59 - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves StdPbc-0823 SEMI C24-0813 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in June 2013. Originally published October 2000; previously published November 2008. NOTICE: This Document was completely rewritten in 2002. The purpose of this Document is to define a method for testing filters or gas