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The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements
SEMI 3D8-1121 (technical revision)
SEMI 3D1 — Terminology for Through Silicon via Metrology
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The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard
C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality StdTpc-Silicon The purpose of this DocumentThe purpose of this Document is to provide specification for hexafluoroethane (C2F6) that is used in the semiconductor industry. This Document covers requirements for hexafluoroethane used in the semiconductor industry. Referenced SEMI Standards None.
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