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M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive and SEMI G28

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Description

and SEMI G28

SEMI C21-0600 (technical revision)

SEMI M18 — Guide for Developing Specification Forms for Order Entry of Silicon Wafers

it distinguishes between mechanical and diffusion leak rates

but it is recommended that the tests be repeated on an annual basis or whenever the instrument appears to be out of control

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive and SEMI G28GaAs Referenced SEMI Standards None.

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